[3dem] Plasma cleaning system and Carbon coater

Tong Wang Tong.Wang at asrc.cuny.edu
Fri Oct 9 05:58:25 PDT 2015


Hi,

Our facility is considering to get a plasma cleaning system and a carbon coater.  I have found Fischione nanoclean and Gatan solarus. Meanwhile I have choice of Leica ACE600, EMS 150TES, and Cressington 208C for the coater, I expect the coater can do both sputter coating and carbon coating. Any opinion and experience are very welcome. I would like to thank everyone in advance.

Best,
Tong
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