[3dem] Recipe Setting for Solarus II Model 955

[Jason NG (CPOS)]

Dear all,

It is solved by increasing the flow to 33.3 sccm for hydrogen gas line.

Thank you for AMETEK (Shanghai) and Ke Yang (Shanghai)'s suggestion.

Regards,
Jason

From: 3dem <3dem-bounces at ncmir.ucsd.edu> On Behalf Of Jason NG (CPOS) via 3dem
Sent: 09 June 2025 12:20
To: 3dem at ncmir.ucsd.edu
Subject: [3dem] Recipe Setting for Solarus II Model 955

Dear all,

We would like to use hydrogen only and input 11.5 sccm of hydrogen, 0 sccm of oxygen. However, the system shows the message "Plasma cleaning failed. Could not strike plasma."

Is there a general guideline for setting up new recipes in Solarus? Thank you.

Regards,
Jason

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