[3dem] EMS T150 ES

Guobin Hu gb_hu at yahoo.com
Fri Jan 5 09:07:19 PST 2018


Hi Cryo-EM folks,
We recently purchased an EMS T150 ES for carbon coating. Originally we had a standard chamber. The coating was very inconsistent. We contact EMS and EMS sent us an extended height chamber and advised us to control the coating by monitoring the FTM (Film Thickness Monitor) reading instead of by editable profiles. It does make the coating more controllable. However, the results are still not consistent.  For example, I coated carbon of 9 nm by FTM and also carbon of 12.5 nm by FTM. The 9 nm thick carbon actually looked thicker than 12.5 nm. I would appreciate it if users here can share your experience with me. 
Thanks,
Guobin

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